LNG Processing Equipment Component Technology
Today's ultra-precision machine tool technology development trend is: technically continue to move toward the limit of the direction of development, to a higher precision, LNG Processing Equipment more efficient direction, to large-scale, miniaturization direction; function to the processing and testing compensation integration direction Development; structure to the direction of multi-functional modular development; functional components to the new principles, new methods, the development of new materials, LNG Processing Equipment in general, is to limit the development of manufacturing technology.
Ultra-precision machine tool technology has now developed into a comprehensive system engineering, the development of the comprehensive use of the basic theory (including cutting mechanism, suspension theory, etc.), key component parts technology, related functional components technology, tool technology, measurement and test analysis Technology, error processing technology, cutting technology, LNG Processing Equipment motion control technology reconfigurable technology and environmental technology. Therefore, the highly integrated technology has become the main feature of ultra-precision machine tools.
In recent years, some new theories, LNG Processing Equipment new principles, new ideas, new methods and new technologies have been applied in the fields of ultra precision base components and machine tool structure.
1 in the machine structure
In order to increase the static stiffness and dynamic stiffness of ultra-precision machine tools, some ultra-precision machine tools with very special structure, LNG Processing Equipment such as the triangular prism vertical structure of the ultra-precision grinding machine is for large diameter (φ 400mm) wafer grinding processing design, The traditional gantry structure in the heavy processing load prone to pitch and deflection of the shortcomings. In recent years, the use of multi-degree of freedom parallel machine tool structure, LNG Processing Equipment and further increase the rigidity of the machine.
In the traditional air static pressure and hydrostatic bearing on the basis of control by the throttle feedback method to achieve active control of the movement to improve the bearing stiffness. Magnetic levitation spindle technology, permanent magnet, electromagnetic and air floatation control program has also been in the study. Porous material of the air bearing can increase the stiffness of the air bearing. LNG Processing Equipment The hydrostatic bearing has the characteristics of high rigidity and good dynamic characteristics, but the fever is its fatal weakness. The hydrostatic bearing is developed for this problem. Compared with the hydrostatic bearing, this bearing has the advantage of smaller bearing heat, suitable for high-speed operation, and no pollution, especially for silicon processing and other industries.